Carbon nanotube emitter and its fabrication method and field emission device (FED) using the carbon nanotube emitter and its fabrication method

ABSTRACT

A carbon nanotube emitter and its fabrication method, a Field Emission Device (FED) using the carbon nanotube emitter and its fabrication method include a carbon nanotube emitter having a plurality of first carbon nanotubes arranged on a substrate and in parallel with the substrate, and a plurality of the second carbon nanotubes arranged on a surface of the first carbon nanotubes.

CLAIM OF PRIORITY

This application makes reference to, incorporates the same herein, andclaims all benefits accruing under 35 U.S.C.§119 from an application forCARBON NANOTUBE EMITTER AND FABRICATING METHOD THEREFOR, AND FIELDEMISSION DEVICE USING THE SAME AND FABRICATING METHOD THEREFOR, earlierfiled in the Korean Intellectual Property Office on 12 Oct. 2004 andthere duly assigned Serial No. 10-2004-0081344.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a carbon nanotube emitter and itsfabrication method, and a Field Emission Device (FED) using the carbonnanotube emitter and its fabrication method.

2. Description of the Related Art

Once unique structural and electrical properties of carbon nanotubeswere known, research has been performed for applying the carbonnanotubes to devices, such as Field Emission Devices (FEDs),transistors, and secondary batteries. In particular, the carbon nanotubeused as an emitter of an FED has many advantages including low drivingvoltage, high luminance, high cost efficiency, and the like. Examples ofmethods of fabricating carbon nanotube emitters include screen printingthat uses a carbon nanotube powder, and a method that uses ChemicalVapor Deposition (CVD). The carbon nanotube growth method that uses CVDhas advantages that it make it possible to fabricate a high-resolutiondisplay device and has a simple process because it directly grows carbonnanotubes on a substrate. Thus, research in carbon nanotube growth isactively progressing. Representative examples of Chemical VaporDeposition include Plasma Enhanced Chemical Vapor Deposition (PECVD) andthermal Chemical Vapor Deposition (CVD).

To fabricate improved FEDs, the carbon nanotubes used as the emittershould have a lower driving voltage and higher electron emission currentand exhibit a uniform electron emission property over a wide area. Tohave a lower driving voltage and higher electron emission current, thecarbon nanotubes should have a thinner diameter and a proper density.Since the diameter of the carbon nanotubes is determined by a size of acatalyst metal on the tube, it is necessary to form and control catalystparticles having a smaller size in order to synthesize carbon nanotubeshaving the thin diameter. Furthermore, in order to adjust the density ofthe carbon nanotubes, it is necessary for the grown carbon nanotubes tobe unidirectional. To obtain a uniform electron emission property overthe wide area, it is necessary for a growth system to provide a uniformtemperature distribution.

SUMMARY OF THE INVENTION

The present invention provides a carbon nanotube emitter with lowdriving voltage and high electron emission current that exhibits uniformelectron emission, its fabrication method and a Field Emission Device(FRD) using the carbon nanotube emitter and its fabrication method.

According to one aspect of the present invention, a carbon nanotubeemitter is provided including: a plurality of first carbon nanotubesfixed on a substrate in parallel with the substrate; and a plurality ofthe second carbon nanotubes formed on a surface of the first carbonnanotubes.

A plurality of nano catalyst particles can be present on the surface ofthe first carbon nanotubes, and the second carbon nanotubes can be grownand formed from the nano catalyst particles.

The nano catalyst particles can be formed of either a nickel (Ni) or anInvar alloy.

Preferably, the first carbon nanotubes have a diameter of 30 to 100 nm,and the second carbon nanotubes have a diameter of 1 to 10 nm.

According to another aspect of the present invention, a method offabricating a carbon nanotube emitter is provided, the method including:growing a plurality of first carbon nanotubes on a first substratehaving a catalyst material layer formed thereon; separating the firstcarbon nanotubes from the first substrate and immersing the firstseparated carbon nanotubes in a dispersion solution; coating a secondsubstrate with the dispersion solution and baking the second coatedsubstrate at a predetermined temperature to arrange the first carbonnanotubes on the second substrate and in parallel with the secondsubstrate; and growing a plurality of second carbon nanotubes from aplurality of nano catalyst particles on the surface of the first carbonnanotubes.

The catalyst material layer can be formed of a nickel (Ni) or an Invaralloy.

Preferably, the first carbon nanotubes are vertically grown on the firstsubstrate by Plasma Enhanced Chemical Vapor Deposition (PECVD).

The first carbon nanotubes can be separated from the first substrate byan ultrasonic wave, and the dispersion solution can be either IsoPropylAlcohol (IPA) or DEionized (DE) water. The dispersion solution cancontain a charging agent.

The dispersion solution can be coated by either electrophoresis or spincoating, and the coated dispersion solution can be baked at atemperature of 70 to 100° C.

Preferably, the second carbon nanotubes are grown by thermal ChemicalVapor Deposition (CVD).

According to yet another aspect of the present invention, a FieldEmission Device (FED) is provided including: a substrate; a cathodeelectrode formed on the substrate; an insulating layer formed over thesubstrate to cover the cathode electrode and having an emitter hole toexpose part of the cathode electrode; a gate electrode formed on theinsulating layer; and a carbon nanotube emitter formed on the cathodeelectrode that is exposed via the emitter hole, wherein the carbonnanotube emitter includes a plurality of first carbon nanotubes fixed onthe cathode electrode in parallel with the cathode electrode, and aplurality of second carbon nanotubes formed on a surface of the firstcarbon nanotubes.

According to yet another aspect of the present invention, a method offabricating a Field Emission Device (FED) is provided, the methodincluding: growing a plurality of first carbon nanotubes on a firstsubstrate having a catalyst material layer formed thereon; separatingthe first carbon nanotubes from the first substrate and immersing thefirst separated carbon nanotubes into a dispersion solution;sequentially forming a cathode electrode, an insulating layer, and agate electrode on the second substrate and forming an emitter hole toexpose part of the cathode electrode; coating a top surface of the gateelectrode and an inner wall of the emitter hole with photoresist tocover them and patterning the photoresist to expose the cathodeelectrode beneath the emitter hole; coating the photoresist and theexposed cathode electrode with the dispersion solution and baking themat a predetermined temperature; removing the photoresist to leave thefirst carbon nanotubes on the exposed cathode electrode; and growing aplurality of second carbon nanotubes from a plurality of nano catalystparticles on the surface of the first carbon nanotubes.

According to yet another aspect of the present invention, a displaydevice is provided including: lower and upper substrates disposed to bespaced apart from each other; a cathode 6 electrode formed on the lowersubstrate; an insulating layer formed over the lower substrate to coverthe cathode electrode, the insulating layer having an emitter hole toexpose part of the cathode electrode; a gate electrode formed on theinsulating layer; a carbon nanotube emitter formed on the cathodeelectrode exposed via the emitter hole, the carbon nanotube emitterincluding a plurality of first carbon nanotubes fixed on the cathodeelectrode and in parallel with the cathode electrode, and a plurality ofsecond carbon nanotubes formed on a surface of the first carbonnanotubes; an anode electrode formed on a bottom surface of the uppersubstrate; and a phosphor layer formed on a bottom surface of the anodeelectrode.

BRIEF DESCRIPTION OF THE DRAWINGS

A more complete appreciation of the present invention and many of theattendant advantages thereof, will be readily apparent as the presentinvention becomes better understood by reference to the followingdetailed description when considered in conjunction with theaccompanying drawings in which like reference symbols indicate the sameor similar components, wherein:

FIGS. 1A and 1B are Scanning Electron Microscopy (SEM) images of carbonnanotubes that are grown on a substrate by Plasma Enhanced ChemicalVapor Deposition (PECVD);

FIGS. 2A and 2B are SEM images of carbon nanotubes that are grown on asubstrate by thermal Chemical Vapor Deposition (CVD);

FIGS. 3A through 3D are views of a method of fabricating a carbonnanotube emitter according to an embodiment of the present invention;

FIG. 4 is a Transmission Electron Microscopy (TEM) image of nanocatalyst particles that are present in sides of first carbon nanotubesthat are grown by Plasma Enhanced Chemical Vapor Deposition (PECVD);

FIGS. 5A through 5D are TEM images of second carbon nanotubes that aregrown according to a method of the an embodiment of the presentinvention;

FIGS. 6A through 6F are views of a method of fabricating a FieldEmission Device (FED) according to an embodiment of the presentinvention; and

FIG. 7 is a schematic cross-sectional view of a display device includinga carbon nanotube emitter according to an embodiment of the presentinvention.

DETAILED DESCRIPTION OF THE INVENTION

The present invention is described more fully hereinafter with referenceto the accompanying drawings, in which exemplary embodiments of thepresent invention are shown. This invention can, however, be embodied inmany different forms and should not be construed as being limited to theembodiments set forth herein. Rather, these embodiments are provided sothat this disclosure will be thorough and complete, and will fullyconvey the scope of the present invention to those skilled in the art.In the drawings, the thicknesses of layers and regions have beenexaggerated for clarity. Like numbers refer to like elements throughoutthe specification.

The growth of carbon nanotubes using Plasma Enhanced Chemical VaporDeposition (PECVD) and Chemical Vapor Deposition (CVD) are discussedfirst below.

FIGS. 1A and 1B are Scanning Electron Microscopy (SEM) images of carbonnanotubes that are grown on a substrate by Plasma Enhanced ChemicalVapor Deposition (PECVD).

FIG. 1A shows carbon nanotubes that are grown for 30 minutes on anunpatterned catalyst metal layer that is formed on a glass substrate.The carbon nanotubes as shown in FIG. 1A were vertically grown on thesubstrate, with the length of carbon nanotubes being about 5 μm and thediameter being about 50 to 80 nm. FIG. 1B shows carbon nanotubes whichhave been grown for 20 minutes by the PECVD on the catalyst metal layer,wherein the catalyst metal layer has been patterned into a disk shapehaving a diameter of 10 μm by a photolithography process. Referring toFIG. 1B, it can be seen that the carbon nanotubes were selectively grownon the circular catalyst metal layer pattern. The grown carbon nanotubesexhibited a length and diameter distribution in which the length isabout 3 μm and the diameter is about 50 to 80 nm.

The carbon nanotube growth method with the PECVD has advantages in thatit is possible to vertically grow the carbon nanotubes on the substrateand it is possible to synthesize the carbon nanotubes at a relativelylower temperature compared to other growth methods. The vertical growthof the carbon nanotubes depends on the direction of an electric fieldapplied between an anode electrode and a cathode electrode in a PECVDsystem. This allows the growth direction of the carbon nanotubes to beadjusted depending on the direction of the electric field. Furthermore,the method has an advantage in that it is easy to adjust the density andto emit electrons by means of the electric field because the growthdirection of the carbon nanotubes is uniform. However, the method hasdisadvantages in that it is difficult to grow uniform carbon nanotubes,and the carbon nanotubes grown at a low temperature have a bad electricfield emission property because of their relatively large diameter.

FIGS. 2A and 2B are SEM images of carbon nanotubes that are grown on asubstrate by thermal Chemical Vapor Deposition (CVD).

The carbon nanotubes on a flat panel substrate (FIG. 2A) and a patternedsubstrate (FIG. 2B) were grown in a random direction. The carbonnanotubes are shown to be tangled with one another. The grown carbonnanotubes have a diameter of about 40 to 50 nm, which is thinner thanthat of the carbon nanotubes grown by the PECVD, and have a growthlength of about 4 μm.

This thermal CVD has advantages in that growth uniformity of the carbonnanotubes is excellent by virtue of the constant temperature of anentire sample, and it is possible to form carbon nanotubes with lowelectron emission initiation voltage (i.e., turn-on voltage) becausecarbon nanotubes can be grown with a thinner diameter as compared to thePECVD. However, thermal CVD has a disadvantage in that the growthdirection of the carbon nanotubes is not constant because an electricfield is not applied to the substrate upon growing the carbon nanotubesunlike the PECVD, and it needs high growth temperature as compared toothers growth method because thermal energy is used for gas dissolution.

FIGS. 3A through 3D are views of a method of fabricating a carbonnanotube emitter according to an embodiment of the present invention.

Referring to FIG. 3A, a catalyst material layer (not shown) is depositedon a first substrate 100, and a plurality of the first carbon nanotubes110 are vertically grown on the catalyst material layer by PECVD. Thefirst grown carbon nanotubes 110 have a diameter of approximately 30 to100 nm. A glass substrate or a silicon wafer can be used as the firstsubstrate 100. The catalyst material layer for the growth of the firstcarbon nanotubes 110 can be Ni or an Invar alloy. The Invar alloy has acomposition of Fe 52 mol %, Ni 42 mol % and Co mol %.

The catalyst material layer, which is used in the growth of the firstcarbon nanotubes 110, is finely broken by strain between a carbon layerof the first carbon nanotubes 110 and the catalyst material layer, andis fixed on a surface of the first grown carbon nanotubes 100 in theform of particles. Thus, the plurality of nano catalyst particles 115are not coagulated but are present uniformly on the surface of the firstcarbon nanotubes 110, which have been grown by the PECVD used in thepresent invention. In this case, the nano catalyst particles 115 have asize of approximately 1 to 10 nm. FIG. 4 is a Transmission ElectronMicroscopy (TEM) image showing that the nano catalyst particles (asindicated by arrows) are present on the surface of first carbonnanotubes, which are grown by PECVD.

Referring to FIG. 3B, the first carbon nanotubes 110 are separated fromthe first substrate 100 and are immersed in a dispersion solution 120 tobe uniformly dispersed. In this case, an ultrasonic wave can be used toseparate the first carbon nanotubes 110. IsoPropyl Alcohol (IPA) orDeIonized water (DI water) can be used as the dispersion solution 120. Acharging agent, such as MgNO3, can be added into the dispersion solution120 so that the first carbon nanotubes 110 are well adhered to thesecond substrate (130 in FIG. 3C).

Referring to FIG. 3C, the second substrate 130 is coated with thedispersion solution 120 having the first carbon nanotubes 110 uniformlydistributed therein, such that the first carbon nanotubes 110 areuniformly arranged on the second substrate 130 in parallel with thesecond substrate 130. Electrophoresis or spin coating can be used tocoat the dispersion solution 120. The coated dispersion solution 120 isbaked at a temperature of approximately 70 to 100° C., such that thefirst carbon nanotubes 110 are fixed to the second substrate 130 at aside thereof.

Referring to FIG. 3D, a plurality of second carbon nanotubes 150 eachhaving a fine diameter are grown on a surface of each of the firstcarbon nanotubes 110, which are fixed on the second substrate 130, bythe thermal CVD. In this process, the second carbon nanotubes 150 aregrown in a random direction from the nano catalyst particles 115 on thesurface of the first carbon nanotubes 110. The second carbon nanotubes150 have a diameter of approximately 1 to 10 nm. FIGS. 5A through 5D areTEM images of the second carbon nanotubes that are grown from thesurface of the first carbon nanotubes by the thermal CVD. Referring toFIGS. 5A through 5D, it can be seen that the second carbon nanotubeswere grown from the nano catalyst particles on the surface of the firstcarbon nanotubes, which have been grown by the PECVD. Furthermore, itcan be seen that the second carbon nanotubes have the same diameter asthat of the nano catalyst particles on the surface of the first carbonnanotubes, and were grown in random directions.

A method of fabricating an FED by applying the method of fabricating thecarbon nanotube emitter of the above-described embodiment is discussedbelow.

FIGS. 6A through 6F are views of a method of fabricating an FEDaccording to an embodiment of the present invention.

Referring to FIG. 6A, a plurality of first carbon nanotubes 210 arevertically grown on a first substrate 200 having a catalyst materiallayer formed thereon by PECVD. The first formed carbon nanotubes 210have a diameter of approximately 30 to 100 nm. Nano catalyst particles215 are present on a surface of the first grown carbon nanotubes 210, aspreviously stated, wherein the nano catalyst particles 215 is formed ofa Ni or an Invar alloy having a size of approximately 1 to 10 nm, forexample.

Referring to FIG. 6B, the first carbon nanotubes 210 are separated fromthe first substrate 200 by an ultrasonic wave, for example, and areimmersed in a dispersion solution 220, such as IPA or DI water, to beuniformly dispersed.

Referring to FIG. 6C, a cathode electrode 232, an insulating layer 234,and a gate electrode 236 are sequentially formed on a second substrate230, and an emitter hole 240 is formed in the insulating layer 234 toexpose part of the cathode electrode 232. A glass substrate can be usedas the second substrate 230. The cathode electrode 232 can be formed ofan Indium Tin Oxide (ITO) that is a conductive transparent material, andthe gate electrode 236 can be formed of a conductive metal, for example,chromium (Cr). Specifically, the cathode electrode 232 is formed bydepositing the cathode electrode layer of the ITO on the substrate 230and patterning the deposited cathode electrode layer into apredetermined shape, for example, a stripe shape. The insulating layer234 is then formed on entire surfaces of the cathode electrode 232 andthe second substrate 230. Subsequently, a gate electrode layer is formedon the insulating layer 234. The gate electrode layer is formed bydepositing a conductive metal by sputtering, for example. The gateelectrode 236 is formed by patterning this gate electrode layer into apredetermined shape. The insulating layer 234, which is exposed via thegate electrode 236, is then etched to form the emitter hole 240 thatexposes the part of the cathode electrode 232.

A photoresist 238 is then coated to cover a top surface of the gateelectrode 236 and an inner wall of the emitter hole 240, and is thenpatterned to expose the cathode electrode 232 positioned beneath theemitter hole 240.

Referring to FIG. 6D, the dispersion solution 220 having the firstcarbon nanotubes 210 uniformly distributed therein is coated on theentire surface of the artifact as shown in FIG. 6C. Electrophoresis orspin coating can be used to coat the dispersion solution 220. The coateddispersion solution 220 is then baked at a temperature of approximately70 to 100° C., such that the first carbon nanotubes 210 is fixed to thephotoresist 238 and the exposed cathode electrode 232 at a side thereof.

Referring to FIG. 6E, the photoresist 230 is removed by acetone, forexample, such that only at least one first carbon nanotube 210 fixed tothe exposed cathode electrode 232 is left.

Referring to FIG. 6F, a plurality of second carbon nanotubes 250 havinga fine diameter are grown on the surface of the first carbon nanotube210, which is fixed to the cathode electrode 232, by the thermal CVD. Inthis process, the second carbon nanotubes 250 are grown in a randomdirection from the nano catalyst particles 215 on the surface of thefirst carbon nanotube 210. The second carbon nanotubes 250 have adiameter of approximately 1 to 10 nm.

FIG. 7 is a schematic cross-sectional view of a display device using theabove-stated FED.

Referring to FIG. 7, a lower substrate 330 and an upper substrate 360are disposed to be spaced apart from each other. A cathode electrode 332is formed on the lower substrate 330, and an insulating layer 334 havingan emitter hole 340 that exposes part of the cathode electrode 332 isformed on the cathode electrode 332. A gate electrode 336 is formed onthe insulating layer 334. A carbon nanotube emitter is formed on thecathode electrode 332, which is exposed via the emitter hole 340. Inthis case, the carbon nanotube emitter is composed of at least one firstcarbon nanotube 310 fixed to the cathode electrode 332 in parallel withthe cathode electrode 332, and a plurality of the second carbonnanotubes 350 formed on a surface of the first carbon nanotube 310. Inthis case, a plurality of nano catalyst particles 315 are present on thesurface of the first carbon nanotube 310, and the second carbonnanotubes 350 are grown and formed from the nano catalyst particles 315by the thermal CVD. An anode electrode 362, which corresponds to thecathode electrode 332, is formed on a bottom surface of the uppersubstrate 360, and a phosphor layer 364 is formed on a bottom surface ofthe anode electrode 362.

As described above, the present invention has the following effects:

First, it is possible to obtain low electron emission voltage by forminga plurality of second carbon nanotubes having a nano size diameter on asurface of first carbon nanotubes.

Second, it is possible to obtain a uniform electron emission byuniformly distributing second carbon nanotubes on the surface of thefirst carbon nanotubes.

Third, it is possible to control emitter density by adjusting theconcentration of first carbon nano tubes.

Fourth, the present invention is easy to apply to a large-sized devicebecause of the use of a dispersion solution.

While the present invention has been particularly shown and describedwith reference to exemplary embodiments thereof, it will be understoodby those of ordinary skill in the art that various modifications in formand detail can be made therein without departing from the spirit andscope of the present invention as defined by the following claims.

1. A carbon nanotube emitter, comprising: a plurality of first carbonnanotubes arranged on a substrate, the plurality of first carbonnanotubes being in parallel with the substrate; and a plurality of thesecond carbon nanotubes arranged on a surface of the first carbonnanotubes.
 2. The emitter of claim 1, wherein a plurality of nanocatalyst particles are arranged on the surface of the first carbonnanotubes.
 3. The emitter of claim 2, wherein the second carbonnanotubes are grown and formed from the nano catalyst particles.
 4. Theemitter of claim 2, wherein the nano catalyst particles comprise eithera nickel (Ni) or an Invar alloy.
 5. The emitter of claim 1, wherein thefirst carbon nanotubes have a diameter in a range of 30 to 100 nm. 6.The emitter of claim 1, wherein the second carbon nanotubes have adiameter in a range of 1 to 10 nm. 7-15. (canceled)
 16. A Field EmissionDevice (FED), comprising: a substrate; a cathode electrode arranged onthe substrate; an insulating layer arranged over the substrate to coverthe cathode electrode and having an emitter hole adapted to expose apart of the cathode electrode; a gate electrode arranged on theinsulating layer; and a carbon nanotube emitter arranged on the cathodeelectrode exposed via the emitter hole, wherein the carbon nanotubeemitter includes a plurality of first carbon nanotubes arranged on thecathode electrode and in parallel with the cathode electrode, and aplurality of second carbon nanotubes arranged on a surface of the firstcarbon nanotubes.
 17. The FED of claim 16, further comprising aplurality of nano catalyst particles arranged on the surface of thefirst carbon nanotubes.
 18. The FED of claim 17, wherein the secondcarbon nanotubes are grown and formed from the nano catalyst particles.19. The FED of claim 17, wherein the nano catalyst particles compriseeither a nickel (Ni) or an Invar alloy.
 20. The FED of claim 16, whereinthe first carbon nanotubes have a diameter in a range of 30 to 100 nm.21. The FED of claim 16, wherein the second carbon nanotubes have adiameter in a range of 1 to 10 nm. 22-31. (canceled)
 32. A displaydevice, comprising: lower and upper substrates arranged to be spacedapart from each other; a cathode electrode arranged on the lowersubstrate; an insulating layer arranged over the lower substrate tocover the cathode electrode, the insulating layer having an emitter holeadapted to expose a part of the cathode electrode; a gate electrodearranged on the insulating layer; a carbon nanotube emitter arranged onthe cathode electrode exposed via the emitter hole, the carbon nanotubeemitter including a plurality of first carbon nanotubes arranged on thecathode electrode and in parallel with the cathode electrode, and aplurality of second carbon nanotubes arranged on a surface of the firstcarbon nanotubes; an anode electrode arranged on a bottom surface of theupper substrate; and a phosphor layer arranged on a bottom surface ofthe anode electrode.
 33. The device of claim 32, wherein a plurality ofnano catalyst particles are arranged on the surface of the first carbonnanotubes.
 34. The device of claim 33, wherein the second carbonnanotubes are grown and formed from the nano catalyst particles.
 35. Acarbon nanotube emitter made according to the method of claim 7,comprised of: said plurality of first carbon nanotubes being arranged onsaid second substrate with the plurality of first carbon nanotubes beingparallel to the second substrate; and said plurality of the secondcarbon nanotubes being arranged on a surface of the first carbonnanotubes.
 36. A field emission device made by the method of claim 7,comprised of: a cathode electrode arranged on the second substrate; aninsulating layer arranged over the second substrate to cover the cathodeelectrode, said insulating layer having an emitter hole disposed toexpose a part of the cathode electrode; a gate electrode arranged on theinsulating layer; and a carbon nanotube emitter arranged on the cathodeelectrode exposed via the emitter hole, wherein the carbon nanotubeemitter comprises said plurality of first carbon nanotubes arranged onthe cathode electrode in parallel with the cathode electrode, and saidplurality of second carbon nanotubes arranged on a surface of the firstcarbon nanotubes.
 37. A display device made by the method of claim 7,comprised of: an upper substrate spaced apart from said secondsubstrate; a cathode electrode arranged on the second substrate; aninsulating layer arranged over the second substrate to cover the cathodeelectrode, the insulating layer having an emitter hole disposed toexpose a part of the cathode electrode; a gate electrode arranged on theinsulating layer; a carbon nanotube emitter arranged on the cathodeelectrode exposed via the emitter hole, the carbon nanotube emitterincluding said plurality of first carbon nanotubes arranged on thecathode electrode in parallel with the cathode electrode, and saidplurality of second carbon nanotubes arranged on a surface of the firstcarbon nanotubes; an anode electrode arranged on a major surface of theupper substrate facing said carbon nanotube emitter; and a phosphorlayer arranged on a bottom surface of the anode electrode.